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Silicon microfluidic chip
Silicon microchannel chips, which are semiconductor chips, are well compatible with traditional IC processes and are conducive to the integration of multi-function chips. In particular, silicon-based
Silicon microchannel chips, which are semiconductor chips, are well compatible with traditional IC processes and are conducive to the integration of multi-function chips. In particular, silicon-based chips can be well introduced into electrical control units. At present, our company is a specific chip cross-sectional structure obtained by wet etching (acid / alkali), in which the chip structure obtained by acid etching is U-shaped and the chip structure obtained by alkali etching is V-shaped.
At the same time, we provide our customers with different chip customization services to meet different customer requirements.
advantage:
1. Channel surface structure is good
Easy to integrate
3. Semiconductor silicon material
Processing specifications:
1. Acid / alkali etching wafer width ratio of close to 2: 1
2. Channel surface roughness is about Ra = 2um